ISSN: (Online) 2321 -4155
ISSN: (Print) 2320 -7000

JOURNAL OF INDIAN RESEARCH
VOLUME : 1, ISSUE : 3 July-September, 2013 (ISSN No. : 2321-4155)
 

RADIO FREQUENCY MICRO ELECTRIC MECHANICAL SYSTEM

(RF MEMS) AND ITS CLASSIFICATION

Pawandeep Kaur Gujral
 
ABSTRACT
The term RF MEMS refers to the design and fabrication of MEMS for RF integrated circuits. It should not be interpreted as traditional MEMS devices operating at RF frequencies. MEMS devices in RF MEMS are used for actuation or adjustment of a separate RF device or component, such as variable capacitors, switches, and filters. Traditional MEMS can be divided into two classes: MEMS actuators and MEMS sensors. The first one is a kind of moving mechanism activated by an electrical signal like Micro motor. Micro sensors are currently available for a large number of applications. Historically, owing to their ease of fabrication, these were the earliest Microsystems. Another reason for the actuators not becoming popular is that the amount of energy generated by such tiny systems does not cause much impact in the associated systems. However, it can be seen later, for microwave and millimetre wave systems, these forces are sufficient to change the properties of overall systems. Passive devices include bulk micro machined transmission lines, filters and couplers. Active MEMS devices include switches, tuners and variable capacitors.
 
KEYWORD
Dendrimer, Electronic Design Automation (EDA), fullerene, micro electro-mechanical systems (MEMS), nano-particles
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